微结构表面的金刚石磨削加工研究

工学硕士学位论文微结构表面的金刚石磨削加工研究鲍良波哈尔滨工业大学2008年6月国内图书分类号：TG580.61+8国际图书分类号：621.923.4工学硕士学位论文微结构表面的金刚石磨削加工研究硕士研究生:鲍良波导师:赵清亮教授申请学位:工学硕士学科、专业:机械制造及其自动化所在单位:机电工程学院答辩日期:2008年6月授予学位单位:哈尔滨工业大学ClassifiedIndex：TG580.61+8U.D.C.：621.923.4DissertationfortheMasterDegreeinEngineeringDIAMONDGRINDINGOFMICROSTRUCTUREDSURFACECandidate:BaoLiangBoSupervisor:Prof.ZhaoQingliangAcademicDegreeAppliedfor:MasterofEngineeringSpecialty:MechanicalManufacturingandAutomationAffiliation:SchoolofMechanicalandElectricalEngineeringDateofDefence:June,2008Degree-Conferring-Institution:HarbinInstituteofTechnology哈尔滨工业大学工学硕士学位论文--I摘要微结构表面以其具有高深宽比、几何特性确定的图案，用以转化元件的机械、物理和化学性能并由此表现出特定功能引起了世界各国广泛的关注与研究。利用金刚石砂轮进行磨削是加工硬脆材料微结构最主要的工艺方法。但由于硬脆材料的难加工性，目前该微结构的磨削加工方法生产效率低、加工成本高，而且磨削表面质量不易控制。因此，迫切需要一套先进的磨削加工工艺。将磨削技术应用到微结构加工中是一个崭新的领域。本研究力图通过对V槽表面形貌的检测与分析以及对加工过程中磨削力、磨削能与工艺参数关系的讨论来探究它的磨削机理和可行性。本课题中，在总结现有研究成果的基础上，应用精密磨床对硬质合金YT15和Al2O3陶瓷这两种材料进行V型槽磨削试验研究。试验中分别通过改变切深、工作台速度，测量了这两种材料在不同工况下的表面形貌、粗糙度以及磨削力。在此基础上研究了材料的表面形貌、粗糙度、磨削力、比磨削能和磨削力比随磨削条件变化的特征，对它们反映出的材料去除机理进行了探讨，并建立了磨削力的数学模型。通过研究发现，硬质合金YT15和Al2O3陶瓷由于材料性能的差异有不同的材料去除方式，表现出不同的磨削性能：YT15主要以滑擦、耕梨的塑性剪切方式去除，而Al2O3陶瓷主要以塑性域和脆性域去除为主，并且加工过程中还出现了少量的耕梨现象；不同的工艺参数对材料的表面粗糙度以及磨削力都有影响。关键词精密磨削；微结构；磨削力；硬脆材料；形成机理哈尔滨工业大学工学硕士学位论文--IIAbstractFunctionalsurfaceofmicrostucturearousesbroadattentionandresearchoftheworld,foritpossessessuchfunctionsashighrationofdepthwithwidth,patternwithcertaingeometrycharacter,mechanical,physical,andchemistrypropertytotransformcomponents.Grindingwithdiamondwheelhasbeenwidelyusedintheproductionofmicrostructuredcomponentsthatproducedbyhardandbrittlematerials.Howevernowadayshardandbrittlematerialsaregroundinlowefficiency,highcostandthequalityisdifficulttocontrol,duetoitshard-to-cutcharacteristics.Sonewadvancedgrindingmethodsareneededurgentlytoimprovemachiningproductivityandgrindingsurfaceintegrality.Theapplicationofgrindingonthemachiningofmicrostructuresisanewarea.ThisarticletriestoresearchintothegrindingmechanismsandfeasibilityofVgroovegrindingbytesting,analyzingthesurfacetopographyofVgrooves,andanalyzingtherelationshipbetweengrindingforce,grindingenergyanddifferentgrindingconditionsintheprocess.Inthisproject,aftersummarizingtheresearchtheoryandexperiences,VgroovesweredonegrindingYT15andaluminaceramicbyprecisionmachine.Surfacetopography,roughnessandgrindingforceindifferentgrindingconditions-differentdepthofcutordifferentfeedrateweremeasured.Andthenitdiscussedtheeffectofvariousparametersonsurfacetopography,roughness,grindingforce,specificgrindingenergy,grindingforceratiowasanalyzed,andalsostudiedtheindicatedmaterialremovalmodes.MathematicsmodelofgrindingforceofVgroovewasbuilt.TheresultsindicatedthatYT15andAl2O3havedifferentmaterialremovalmodeandgrindingperformancesduetotheirdifferentmechanicalproperties.WhengrindingtheYT15,thematerialwasremovedonplasticmodethroughslidingandductileploughbetweenthegrainandmaterials,andtheAl2O3wasremovedmailyonplasticmodeandsemi-plasticmodethroughextrusion,smash,andalittledutileplough.Grindingconditionsinfectsurfaceroughnessandgrindingforce.哈尔滨工业大学工学硕士学位论文--IIIKeywordsprecisiongrinding，microstructure，grindingforce，hardandbrittlematerials，formationmechanisms哈尔滨工业大学工学硕士学位论文-IV-目录摘要.......................................................................................................................IAbstract......................................................................................................................II第1章绪论..............................................................................................................11.1微结构表面磨削加工研究的目的与意义.......................................................11.2微结构表面磨削加工技术的发展现状...........................................................21.2.1国外微结构磨削技术的发展现状............................................................21.2.2国内微结构磨削加工的发展现状............................................................41.3本课题的研究内容...........................................................................................4第2章V型槽精密磨削加工试验............................................................................62.1引言...................................................................................................................62.2试验的设备.......................................................................................................62.3材料的选择.......................................................................................................82.4被加工表面的检测...........................................................................................92.5试验工艺方案.................................................................................................102.6本章小结.........................................................................................................10第3章磨削参数对V型槽试验结果的影响分析.................................................113.1引言.................................................................................................................113.2磨削表面形貌的观测与分析.........................................................................113.2.1硬质合金YT15的磨削表面形貌分析...