TEM／STEM-manual-(JEM-2100F)

TEM/STEMmanualJEM-2100F(ver.2)Location:ShizuokaUniversityHamamatsuCampusResearchInstituteofElectronicsCenterforNano-deviceFabricationandAnalysisContents0.Operationboardandaperture(basicoperation)1.Observationpreparation1.1Preparethemainbody1.2Attachthesampletothesampleholder1.3Cleanthesample1.4Setthesampleholder1.5Generatetheelectronbeam1.6Lookforthesample1.7AdjusttheZfocus(×40k)→Adjusttheheightpositionofthesample1.8Makesurethespotsizeandαselector2.TEMobservation(variousadjustment)2.1Adjustthepositionofthefocusingaperturemethod1method22.2Astigmatismcorrectionofthefocusinglens2.3Interlockingratioofcapacitor2.4Checkthefocus2.5Adjustthevoltageaxis2.6Adjustthepositionoftheapertureoftheobjectivelens2.7Astigmatismcorrectionoftheobjectivelens2.8Photographing3.SelectedAreaDiffraction(SAD)3.1SAD3.2Astigmatismcorrectionoftheintermediatelens4.NanoBeamDiffraction(NBD)5.Dark-fieldimageobservation6.STEMobservation6.1Activethesoftware6.2Alignment6.3AstigmatismcorrectionbyRonchigram6.4STEMBrightField/DarkFieldobservation6.5Capturetheobservedimageandsave6.6ExitProceduresofSTEM7.EDSmeasurement7.1Measurementsetup7.2InsertionofEDSanalyzer7.3Componentmapping7.4ExitProceduresofEDS8.AdjusttheGunAlignment9.ExitProcedures10.Correspondenceoftrouble0.Operationboardandaperture■FUNCTION:MAG1,MAG2,LOWMAG,SAMAG,SADIFF[R]…SelectionoftheimagemodeMAG1…NormalmagnificationmodeMAG2…SpecificmagnificationmodeLOWMAG…LowmagnificationmodeSAMAG…SelectedareamagnificationmodeSADIFF…Selectedareadiffractionmode■Zswitch:△Z,▽Z[R]…Focuscoarseadjustment(MovementintheZdirectionofsample)■OBJFOCUS[R]…Focusfineadjustment(Objectivelens)■SHIFTX,Yknob[L,R]…Adjustthepositionofthebeam(Changethecurrentofthedeflectioncoilofthefocusinglens)■BRIGHTNESSknob[L]…BrightnessoftheelectronbeamCounterclockwisetuning→LightenClockwise→Darken■DEFLECTOR:IMAGESHIFT,PLA,CONDSTIG,DARKTILT,BRIGHTTILT[L]+DEFX,Yknob[L,R]IMAGESHIFT…FieldofvisionmovementinthehighmagnificationPLA…AstigmatismcorrectionoftheprojectionlensCONDSTIG…AstigmatismcorrectionofthecondenserlensOBJSTIG…AstigmatismcorrectionoftheobjectivelensDARKTILT…Tiltingoftheelectronbeam(Indarkfield)BRIGHTTILT…AdjustmentofthevoltageaxisAdjustthemagnificationbyMAG/CAML[R]AdjustthecameralengthbyMAG/CAML[R]1.Observationpreparation1.1Preparethemainbody①DisplayON(ThemainpoweroftheleftPCisalwaysON)②Click「Normal」of「FEG:Fieldemissiongun」(Itincreasesfrom160kVto200kVfor13.3min)③PourtheliquidnitrogenintotheACD(anti-contaminationdevice)Atthistime,theobservationwindowmustbecoveredⅰ)Removetheheater※RemovetheconnectorandslidtothetopDon’ttouchtheheaterwithbarehands.It’shotimmediatelyafterheatingⅱ)Ventilate,wearleathergloves,andtransfertheliquidnitrogentoaDewarⅲ)Setthefunnelandprocessedfilmcaseⅳ)PuttheKimwipetothefunnelandpourtheliquidnitrogen※Kimwipepreventicefromenteringⅴ)Bumpingoccursabout5minutesⅵ)Pourtheliquidnitrogenuntilthefulltankⅶ)Removeonlyfunnelandclosethelid※Ittakes1hourtoACDiscooledWhenitisfilledup,thereisabout7hourscoolingeffectTheliquidnitrogeniseffectivetotrapwhatcausecontaminationaroundthesample,souseitevenatlowmagnificationobservationWhenthereisnotliquidnitrogen,contaminationtrappedbyanionpumpisabsorbedtodeviceandavacuumturnsworseandadverselyaffectsadevice1.2Attachthesampletothesampleholder・Uniaxialsampleholder①Loosenthescrews②Shiftthesamplestage③Setthesample④Returnthesamplestageandtightenthescrews・Biaxialsampleholder(Fasteners,washers,andscrewsaremadeofharmfulBe(beryllium))L※Themovableportionofthetipismadewithhighaccuracy.Donotdeformit.①Tightentheresinscrewsonthesideofthesamplestageandsecuretheholder②Loosenthesetscrewswhichsecurethefastenersandwashers③Removethefastenersandwashers④Setthesample.Turntheobservationsectionbelow.Inthecaseofmicro-grid,turncarbonvapordepositionside(blackface)below.⑤Replacethewashersandfastenersandtightenthesetscrews⑥Shakenlightlyholderandconfirmnosound(Becarefulnottohitthetip)1.3CleanthesampleRemovethecontaminationonthesampleusinganioncleaner※Notethesampleisnotsuitableforcleaning①Removethedummyholderandsetthesampleholder②Power-onandwaitforawhile③Voltagedisplayis“000”④Wash“3minutes”involtage“290-300”⑤Power-off,removethesampleholder,andsetthedummyholder※SetquicklythesampletoTEMbodyaftercleaning1.4Setthesampleholder①MakesurethatO-ringdoesnothaveagarbage.Setthesampleholdertothelensbarrel.②Adjusttheledgeofsampleholderandlensbarrel,insertthesampleholderuntilabouthalf③Switchfrom“AIR”to“PUMP”※Whenvacuuming,keeplightlypressthesampleholder※Switchbypullingtheknob※Connecttheconnecterinthecaseofbiaxialholderuse④Waitthelampbecominggreenfromorange※”specimen/PIG4”＜40μA⑤Turnclockwiseabout30degreesandpressthesampleholder⑥Turnclockwiseabout60degreesandpressthesampleholder(Graspthesampleholdersinceitispulled)⑦Pushthesampleholderallthewaybackslowly⑧SelectasampletableinthePCscreenupperrightUniaxial:EM-21010,Biaxial:EM-316401.5Generatetheelectronbeam①Opentheobservationport②”BEAM”[L]ON③”STDFOCUS”[R]ON.Inthecaseofmicro-grid,itmeetsmostheight.※Whenusingmicro-grid,itmaynotbeanythingdisplayedonthefluorescentscreenevenirradiating