废气处理设备

台湾东服废气处理设备GDO1861-WAThermal-WetTypeScrubberOurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]tionOurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVOurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage02ØEasyPM(0.5~1hour)ØWaterwalltopreventcloggingandcorrosionØSEMIS2ComplianceØTargetsCVD,Etch,DiffusionØLowmake-upwaterØElectricalcontrolsystemØCommonoption-ExtensionLCDMonitorController-ExhaustBlower(ScrubberOutlet)-SegregategasandwaterboxSEMIS2-0302SEMIS8-0999SEMIS10-1296OurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]ØProcess2or4InletportsØDimension(MM)1008(D)X1208(W)X2450(H)ØWeight423KgØHighcapacity400SLMØMTBF7300(hours)ØMTTR1(hour)OurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage03Overview1861-WAOurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]04OurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage05Howdoesitwork1OurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage06UniqueDesign1ØNopowderBuilt–upcloggedØPrimaryreactionchambernevercorrosionØReduceoperationandrunningcostOurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage07UniqueDesign2OurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage08UniqueDesign4OurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage09UniqueDesign3OurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage10ElectricalControlSystemØHighaccuracyprogrammablelogicalcontrolsystem.ØEasilytraceelectricalwiringpointtopoint.ØEveryelectroniccomponenthascertifiedasUL,CE….ØFans&automaticcoolingsystemtokeepinroomtemp…OurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage11HumanMachineInterfaceØEasytooperateØDisplayofEnglishorChineseØRealtimealarminformationØAlarmhistory(datastorageover2000record)ØOn-linealarmtroubleshootingØPreventivemaintenancemanualOurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage12Runningcost(水.電.氣)RunningcostofoneyearModelNo.GDO1861-WAOneyearcostPower3.7KW/HrUSD1,841CityWater2.8L/minUSD563N228L/minUSD1,234CDA10L/minUSD433TotalCostofOneYearUSD9,524OurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage13大陸各廠實機p中芯半導體(上海廠)p中芯半導體(天津廠)p中芯半導體(北京廠)p中芯半導體(成都廠)p台積半導體(松江廠)p華潤上華(無錫廠)p首鋼日電(北京廠)p先進半導體(上海廠)p林洋電子(南通廠)p世紀電子(深圳廠)p通用光伏(煙台廠)OurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/UVPage14維修團隊u維修廠區:上海康橋工業區,佔地面積3000坪u維修團隊:Scrubber維修團隊15人維修課長林展璋10年維修經驗維修組長崔漢博5年維修經驗維修組員王立民4年維修經驗維修組員孫學強4年維修經驗維修組員劉邦4年維修經驗維修組員范建飛3年維修經驗其他組員都有2年以上維修經驗u維修專業:我司維修工程師,都受過專業訓練,現場機台操作訓練,對於各種機型都有維修能力,全年無休配合客戶需求,2000年到大陸至今客戶反應良好,服務品質頗受肯定。u上海康克仕商贸--方丽OurBusiness:SemiScrubberChillerVacuumProductsPumpOilEPOXY:Electrical/General/Optical/Thermal/[e-mail]