PECVD设备简介

PECVD设备简介PECVD全称PECVD：PlasmaEnhancedChemicalVaperDeposition等离子体增强型化学气相沉积机台组成机台由三部分组成:Automatedcassetteloadstation(ACLS)(optional)（Port1、Port2、Port3、Port4）MainframeRemotesupportsystemequipmentlocatedinaserviceareaoutsidethecleanroomACLSTheACLS是cleanroom和mainframe的交界把白玻璃从cassettes传送到mainframeloadlocks，把完成制程的玻璃从mainframe传送回cassettes包含ATMrobotcontroller和operatorcontrolmoduleMAINFRAME组成主体DoubleDualSlotLoadlock（DDSL）TransferChamber（TC）ProcessChambers(PC)GasPanel控制制程气体流入processchambersMainframecontroltowerHousesthemainframepowerdistribution（配电箱）DCpowersupplies（直流电供应）VME（VersaModuleEurocardbus）controller（集成电路板）MAINFRAMEGasPanelMainframeControlTowerTransferChamberDDSLProcessChambersDOUBLEDUALSLOTLOADLOCKTRANSFERCHAMBERViewwindowsPROCESSCHAMBER(RPSC)机台保养（PM）PM：PreventativeMaintenance预防性保养Daily（日点检）Weekly（周保）Monthly（月保）Quarterly（季保）Semi-Annual（半年保）Annual（年保）DAILYPREVENTIVEMAINTENANCE点检各Chamber冷却水流量，CDA、purgeN2压力，DIwater（DeionizationWater去离子水）水位、电阻值等，是否在规格之内绕机台检查有无泄漏处，查看PumpWarningmessageWEEKLYPREVENTIVEMAINTENANCE测各Chamber的Leakrate,Basepressure,是否在规格之内MQC(machinequalitycontrol):Thickness,U%,particle数量,以及量膜边，是否在规格之内对机台表面的卫生进行清洁，灰尘用IPA（iso-Propylalcohol异丙醇）擦拭干净MONTHLYPREVENTIVEMAINTENANCE数据备份马达上油更换PadFlowcal检查Pumping的OilLevel，对于OilLevel较低的添加新的OilQUARTERLYPREVENTIVEMAINTENANCE清ScrubberRFcalibration更换DIwater及FilterSEMI-ANNUALPREVENTIVEMAINTENANCEPC开腔，wetclean更换Grounding更换PCLidO-ring,GaslineO-ring,TCLidO-ringSpacingcalibrationANNUALPREVENTIVEMAINTENANCE机台断电，解决各种问题更换PumpingLineExhaustFilter清理Chamber内部的Particle对Pump进行检修维护