SECSI-SECSII-HSMS-GEM总结

SEMICim部Cell与Module科徐宝龙SEMISEMI:SemiconductorEquipmentandMaterialsInternational国际半导体设备与材料产业协会SEMICONTENTSEquipmentAutomationHardwareEquipmentAutomationSoftwareFacilitiesFlatPanelDisplayGasesMaterialsMicrolithographyPackagingProcessChemicalsSafetyGuidelinesSiliconMaterials&ProcessControlTraceabilitySemiconductorEIS用到标准SECS:SemiconductorEquipmentCommunicationStandardSECSI(E4)SECSII(E5)GEM(E30)HSMS(E37)SECSII(E5)GEM(E30)SESCI(E4)HSMS(E37)RS232TCP/IPApplication9600bps10MbpsSECSI该标准定义了半导体工艺设备（晶片制造，加工，检测，组装，打包设备）和主机之间交换消息通信的接口。该标准包括物理连接器（9-pinor25-pin），电平信号，传输速率，以及交换消息的逻辑协议。物理传输单位01~8bit9StartBitEndBit传输10个bit，0和9是开始和结束信号，1-8bit是数据逻辑传输单位（Block）ReceiveEOT1byteBlocklength10~254byteblock2byteChecksum先传输块的长度，在传输块，最后发送校验码Block组成10byte0~244byteHeaderDateDefineinE5SECSIHeader组成UpperDeviceIDSystemByteSystemByteLowerDeviceIDUpperMessageIDLowerMessageIDUpperBlockNo.LowerBlockNo.SystemByteSystemByteRWE0:HostEQP1:EQPHost0:Noreply1:reply1:lastBlockHandshakeBytesENQ5RequesttoSendEOT4ReadytoReceiveACK6CorrectReceptionNAK21IncorrectReceptionHostEQPENQEOTChecksumACKBlocklengthHSMSHIGH-SPEEDSECSMESSAGESERVICESHSMSGeneralMessageFormat4byte10byte0~4GLengthHeaderMessageTextLength=HeaderLength+MessageTextLengthFormatisspecifiedbyPTypeHSMSHeader组成DeviceIDHeaderByte2HeaderByte3Ptype=0STypeSystemByte0-123456-9HeaderByte2-3Ptype=0StreamWFunctionHeaderByte2HeaderByte3W=1：reply，W=0NoreplyPType(PresentationType)0SECS-IIEncoding1–127Reservedforsubsidiarystandards128–255Reserved,notusedSType(SessionType)SType是一个识别该消息是HSMSDataMessage(value=0)或者其他HSMSControlMessages(other).0DataMessage1Select.req2Select.rsp3Deselect.req4Deselect.rsp5Linktest.req6Linktest.rsp7Reject.req8(notused)9Separate.req10(notused)11–127Reservedforsubsidiarystandards128–255Reserved,notusedMessageHeaderTextMessageTypeBytes0-1SessionIDByte2Byte3Byte4PtypeByte5StypeBytes6–9SystemBytesTextDataMessage*W-bitSECSStreamSECSFunction00Primary:UniqueReply:SameasprimaryNoneSelect.req*0001UniqueNoneSelect.rspSameas.req0SelectStatus02Sameas.reqNoneDeselect.req*0003UniqueNoneDeselect.rspSameas.req0DeSelectStatus04Sameas.reqNoneLinktest.req0xFFFF0005UniqueNoneLinktest.rsp0xFFFF0006Sameas.reqNoneReject.reqSameMessageReasonCode07SameasmessagebeingrejectedNoneSeparate.req*0009UniqueNoneSelectStatussuccessfullyalreadyhasSelectedConnectionNotReadyConnectExhaustsubsidiarystandard-specificlocalentity-specificreasons01234-127128-255DeselectStatussuccessfullyCommunicationNotEstablishedCommunicationBusysubsidiarystandard-specificlocalentity-specificreasons0123-127128-255RejectReasonCodeSTypeNotSupportedPTypeNotSupportedTransactionNotOpenEntityNotSelectedsubsidiarystandard-specificlocalentity-specificreasons01234-127128-255HSMSConnectionStateDiagramNotConnectionNotSelectedSelectedConnectionT7ConnectionTimeout.234517HSMSTCP/IPConnectModesActiveMode:获得一个端口发送连接请求等待回复收到ACKConnectedPassiveMode:绑定一个公开的端口等待连接请求发送ACKConnectedSECSIIDataStructuresDataItem|VariableItem|ObjectDictionaryMessageDetailDataStructuresNo.ofitemformatcodelengthbytes2itemformatcode87654321134LengthbytesFormatbyte0=Illegal,dataformaterror1=Onebinarylengthbyte(max=255)2=Twobinarylengthbytes(max=64k)3=Threebinarylengthbytes(max=7.99M)ItemFormatCodes000000LIST(lengthinelements)001000Binary001001Boolean010000ASCII1010001JIS-80100102-bytecharacter2,40110008-byteinteger(signed)20110011-byteinteger(signed)0110102-byteinteger(signed)20111004-byteinteger(signed)21000008-bytefloatingpoint31001004-bytefloatingpoint31010008-byteinteger(unsigned)21010011-byteinteger(unsigned)1010102-byteinteger(unsigned)21011004-byteinteger(unsigned)2examplea.binary10101010.00100001Item,binary,1lengthbyte000000011bytelong10101010databyteb.“ABC”01000001ItemASCII,1lengthbyte00000011Threebyteslong01000001ASCIIA01000010ASCIIB01000011ASCIICc.Anitemcontainsthreebinarynumbersin2-bytesignedintegerform.01101001Item,2-byteintegers000000102bytestotal(2/2=1integers)xxxxxxxxMSBytenumberxxxxxxxxxLSBytenumberxGEMGENERICMODELFORCOMMUNICATIONSANDCONTROLOFMANUFACTURINGEQUIPMENT该标准定义了一套通用的设备的动作以及通信功能的标准。TraceReportTerminalservicesMaterialmovementProcessprogramLimitMonitoringspoolingalarmcontrolprocessingcommunicationEquipmentHarelNotationStateORSubstatesANDSubstatesTransition状态转换标志Defaultentrypoint默认进入点hHistory历史记录sSelectcConditionalselectorCommunicationsStateDiagramCommunicationenableDisableCommunicatingNotCommunicatingWaitCRWaitDelayWaitCRApassiveActivecRS1f14RS1f13ECID=2ControlStateModelLocalRemoteEquipmentOff-lineHostOff-lineAttemptOn-lineccccOff-lineOn-lineOfflineEQPcan’tcommunicationwithHostexceptS1F13,S1F17andS2F42.andSxFyreplyS*F0.OffLine-OnLineneedsendS2F17Date&TimeRequestIfPTSTLRorURreportceid200203ECID=3ProcessingStateDiagramINITIDLESETUPEXECUTINGREADYPAUSEHProcessingStateSTOPABORTcompletedPAUSEalarmRESUMELimitStateModelDISABLEDBELOWLIMITNOZONEABOVELIMITCENABLEDStateDiagramforAlarmALIDnAlarmClearAlarmSetS5F1AlarmReportSentS5F3Enable/DisableAlarmSend(EAS)S5F103CurrentAlarmSetListRequesttransactionTransactionDefinit